Use of a neural network to link AFM etch patterns to plasma parameters

Plasmas play a critical role in depositing thin films or etching fine patterns while manufacturing integrated circuits. A new model for plasma diagnosis is presented. This was accomplished by linking atomic force microscopy (AFM) to plasma parameters using a neural network. Experimental AFM data were collected during the etching of silicon oxynitride films in C₂F₆ inductively coupled plasma. Surface roughness of etched patterns was characterized by means of discrete wavelet transformation. This led to the construction of three vertical (type I), diagonal (type II), and horizontal (type III) wavelet coefficient-based models. The performance of diagnosis models was evaluated in terms of the prediction and recognition accuracies. Both accuracies were optimized as a function of the number of hidden neurons. Comparisons revealed that the type I model yielded the largest recognition and the smallest prediction error. This was demonstrated even under stricter monitoring conditions. More improved diagnosis is expected by enhancing AFM resolution.     

压穿断层完善井网的可行性探讨

通常情况下，复杂断块油气田中的细小断层十分发育，单井单块的情况在一些油田经常遇到。那么在一定的地质条件下，能否在生产过程中通过压裂改造的方式，打破断层限制、完善注采井网，实现区块的整体注采开发呢？通过一个典型的生产实例，从油井见效原因、生产动态情况及地质构造等方面进行了阐述，并提出了具体建议，对压穿断层注水开发的可行性进行探讨。     

运用模糊综合评判方法定量研究断层封闭性

综合考虑影响断层封闭性的7种主要因素，运用模糊评判方法对夏口断裂带中部3条主要控油断层的封闭性进行了定量研究。综合评价结果与实际勘探相符，表明评判方法是可靠的，可为工区的油气勘探提供科学依据。     

炼油企业泵振动故障诊断

通过现场振动故障诊断案例的分析,找出了炼油企业中泵振动故障的原因主要是泵转子不平衡、小流量、泵转子与壳体不同心、泵轴承故障等。并在停机检修后发现故障产生的原因与诊断的相符,大大降低了故障诊断的难度,快捷、准确地解决问题,为企业效益最大化奠定了基础。     

On the relationship between parity space and approaches to fault detection

Parity space approach and H₂ approach are two important fault detection approaches. This paper studies the relationship between these two approaches, which reveals frequency domain characteristics of the optimal solution of the parity space approach on the one side and provides a numerical solution of the H₂-optimal design of residual generators on the other side.     

万用表电压测量法查找直流接地故障

直流电源是发电站的主要设备，一旦直流系统发生接地故障，将会严重地危及到发电站的安全和经济运行。因此，本文介绍一种简单易行，能快速找出直流接地点的方法一万用表电压测量法。     

A frequency domain approach to fault detection in sampled-data systems

This paper deals with fault detection problems in sampled-data (SD) systems. A tool is first introduced for the analysis of intersample behavior of SD systems in the frequency domain from the viewpoint of fault detection and isolation. Based on it, a direct design approach of fault detection systems for SD systems is proposed, and further the problem of full decoupling from unknown disturbances is studied.     

A formal model of asynchronous communication and its use in mechanically verifying a biphase mark protocol

We present a formal model of asynchronous communication between two digital hardware devices. The model takes the form of a function in the Boyer-Moore logic. The function transforms the signal stream generated by one processor into that consumed by an independently clocked processor, given the phases and rates of the two clocks and the communications delay. The model can be used quantitatively to derive concrete performance bounds on communications at ISO protocol level 1 (physical level). We use the model to show that an 18-bit/cell biphase mark protocol reliably sends messages of arbitrary length between two processors provided the ratio of the clock rates is within 5% of unity.     

模糊数学在电视机故障诊断中的应用

本文介绍了应用模糊数学方法进行计算机辅助诊断电视机的故障原因,这种方法有效性在于建立模型的因果关系正确性和自动搜索范围及速度。     

对康明斯发动机燃烧状况振动测点位置的研究

本文从理论上探讨了用机械振动分析法对康明斯发动机的燃烧状况进行监测时，应出现的振动信号的时域、频域波形的情况，并以此为指导在实验中确定了振动的最佳测点位置。